MEMS固体化学微推进阵列的微冲量测试技术

Micro-Impulse Measurement of MEMS Solid Propellant Thruster Array

中文关键词:  微推进器  冲量  冲击摆  转动惯量 

英文关键词:Micro-thruster  Impulse  Ballistic pendulum  Moment of inertia

中文摘要:

      为了评价MEMS(Micro Electro Mechanical Systems)固体化学微推进阵列的推进性能,对其单元微冲量的精确测试显得尤为重要。在传统冲击摆的基础上,考虑微推进器推力和燃气射流冲击力之间的比例关系,设计了一套适用于MEMS固体化学微推进阵列单元微冲量的间接测试装置,并成功用于6×6规格(单元集成度为36个/cm²)微推进阵列的实际测试中。结果表明:典型实验数据下的待测微冲量为2.5442×10-4Ns,相对误差小于5%；实测8个单元的微冲量平均值为2.5574×10-4 N·s,相对偏差较小,具有很好的重复性。 

英文摘要:

      In order to evaluate the propulsion performance of MEMS (Micro Electro Mechanical Systems) solid propellant thruster array, accurate measurement of unit micro-impulse is particularly important. Based on the traditional ballistic pendulum, as well as considering the relationship between the thrust and the impact of the gas jet, an indirect micro-impulse measuring device was designed. It was successfully used in the measurement of 6mm×6mm (integration density is 36/cm²) MEMS solid propellant thruster array. The results show that the unknown micro-impulse is 2.5442×10-4N·s under typical experimental datum, and the measurement accuracy meets the requirement of ballistic pendulum system in which the relative error is below 5%. The average impulse of 8test units is 2.5574×10-4 N·s with small relative deviation and good reproducibility. 